Patent · US Active

Radiation source device

US12158448B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Derek Debie · Bogen, DE
Klaus Elian · Alteglofsheim, DE
Ludwig Heitzer · Regensburg, DE
David Tumpold · Tauberbischofsheim, DE
Jens Pohl · San Luis Obispo, US
Cyrus Ghahremani · Regensburg, DE
Thorsten Meyer · Regensburg, DE
Christian Geissler · Teugn, DE
Andreas Allmeier · Pfatter, DE

Key dates

Filing date	Oct 27, 2022
Grant date	Dec 3, 2024
Priority date	—
Expiry date	Oct 27, 2042

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/06186
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A radiation source device includes at least one membrane layer, a radiation source structure to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, and wherein the radiation source structure is arranged between the at least one membrane layer and the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.