Pyrometry error detection sensor for RTP temperature control system
US12159797B2 · kind B2 · utility
0Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2021 |
| Grant date | Dec 3, 2024 |
| Priority date | — |
| Expiry date | Jan 21, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments disclosed herein include a method for determining a temperature error of a pyrometer. In an embodiment, the method comprises measuring a first signal with a first sensor of the pyrometer and measuring a second signal with a second sensor of the pyrometer. In an embodiment, the method further comprises determining a reflectivity of a reflector plate from the first signal and the second signal, and determining the temperature error using the reflectivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.