Reflective compact lens for magneto-optic Kerr effect metrology system
US12164093B2 · kind B2 · utility
0Cited by
16References
19Claims
0Family size
Inventors
Key dates
| Filing date | Oct 19, 2021 |
| Grant date | Dec 10, 2024 |
| Priority date | — |
| Expiry date | Jan 1, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.