Patent · US Active

Reflective compact lens for magneto-optic Kerr effect metrology system

US12164093B2 · kind B2 · utility

0Cited by
16References
19Claims
0Family size

Inventors

Key dates

Filing dateOct 19, 2021
Grant dateDec 10, 2024
Priority date
Expiry dateJan 1, 2042

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/9501
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A Cassegrain or quasi-Cassegrain structure objective lens is used in a polar MOKE metrology system. The quasi-Cassegrain reflective objective lens includes a primary concave mirror and a secondary mirror. The primary concave mirror has a wider diameter than the secondary mirror and defines an aperture through which the laser beam is configured to be transmitted toward the secondary mirror. The secondary mirror can be convex, concave, or have a flat surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.