Detection of surface particles on chamber components with carbon dioxide
US12169163B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2023 |
| Grant date | Dec 17, 2024 |
| Priority date | — |
| Expiry date | Oct 24, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1497
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A distribution unit of a particle detection system initiates a particle collection process to dislodge one or more surface particles from a surface of an article based on a stream including at least one of solid CO2 particles or CO2 droplets. The dislodged surface particles are collected on a surface of a substrate having a pre-determined initial state including initial surface particles of the substrate. A measurement indicating a particle number concentration of detectable surface particles on the substrate after the particle collection process is completed is obtained. An initial particle number concentration of the initial surface particles of the pre-determined initial state is identified. A number of particles transported away from the surface of the article is determined based on the obtained measurement and the identified initial particle concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.