Transmission electron microscope and inspection method using transmission electron microscope
US12170184B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2019 |
| Grant date | Dec 17, 2024 |
| Priority date | — |
| Expiry date | Sep 1, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transmission electron microscope capable of obtaining a hollow-cone dark-field image and visually displaying irradiation conditions thereof includes an irradiation unit for irradiating a specimen with an electron beam, an objective lens for causing the electron beam transmitted through the specimen to form an image, beam deflectors positioned higher than a position where the specimen is placed, an objective movable aperture for passing only a portion of the electron beam transmitted through the specimen, and a deflection coil control unit. The deflection coil control unit controls a deflection angle of the electron beam using the beam deflectors such that the specimen is irradiated with the electron beam at a predetermined angle with respect to an optical axis while the electron beam is moving in a precessional manner and only a diffracted wave and/or a scattered wave having a desired angle passes through the objective movable aperture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.