Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
US12173403B2 · kind B2 · utility
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Key dates
| Filing date | Apr 30, 2021 |
| Grant date | Dec 24, 2024 |
| Priority date | — |
| Expiry date | Apr 30, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.