Inspection method
US12181513B2 · kind B2 · utility
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1References
12Claims
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Assignee
Inventors
Key dates
| Filing date | Sep 30, 2020 |
| Grant date | Dec 31, 2024 |
| Priority date | — |
| Expiry date | Jan 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/27
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.