Plasma resistant arc preventative coatings for manufacturing equipment components

US12198903B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Joseph F. Sommers · San Jose, US
• Joseph Behnke · San Jose, US
• Xue Yang Chang · San Jose, US
• Anwar Husain · Pleasanton, US
• Alexander SULYMAN · San Francisco, US
• Timothy Joseph Franklin · Campbell, US
• David J. Coumou · Webster, US

Key dates

• Filing date: Dec 10, 2021
• Grant date: Jan 14, 2025
• Expiry date: Jan 17, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/334
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method includes depositing a first layer of a first material onto a surface of a chamber component of a processing chamber. The first material comprises a polymer, the polymer having a dielectric strength of at least 40 MV/m. The method further includes depositing a second layer of a second material onto the first layer. The second material comprises a first ceramic material impregnated into the first polymer or a second polymer. The method further includes depositing a third layer. The third layer is of a third material. The third material includes the first ceramic material or a second ceramic material. The third material does not adhere to the first polymer or the second polymer. The third material does adhere to the first ceramic material or the second ceramic material of the second layer.