Device and method for the alignment of substrates
US12199062B2 · kind B2 · utility
0Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 30, 2020 |
| Grant date | Jan 14, 2025 |
| Priority date | — |
| Expiry date | Jan 23, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/40
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention relates to a device and a method for the alignment of substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.