Inventor · Linz, AT

Thomas Plach

29Patents
4h-index
20Co-inventors
59Inventor score

Filing activity: Jan 25, 2011 → Feb 15, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10109487B2 Method for bonding substrates Electricity 8 Active
US8975158B2 Method for permanently bonding wafers Electricity 6 Active
US10279575B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 6 Active
US11282706B2 Device and method for bonding of substrates Electricity 5 Active
US9159717B2 Method for permanently bonding wafers Electricity 3 Active
US11315813B2 Substrate holder and method for bonding two substrates Electricity 2 Active
US10636662B2 Device and method for bonding of substrates Electricity 2 Active
US12025426B2 Measuring device and method for determining the course of a bonding wave Electricity 1 Active
US10504730B2 Device and method for bonding of substates Electricity 1 Active
US11059280B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 1 Active
US10748770B2 Device and method for bonding of substrates Electricity 1 Active
US11315901B2 Method for bonding substrates Electricity 1 Active
US10991609B2 Method and substrate holder for the controlled bonding of substrates Electricity 1 Active
US10861699B2 Device and method for bonding of substrates Electricity 1 Active
US11251045B2 Device and method for bonding of substrates Electricity 1 Active
US9252042B2 Method for permanent bonding of wafers Electricity 1 Active
US11527410B2 Device and method for bonding of substrates Electricity 1 Active
US12412865B2 Apparatus and method for bonding substrates Electricity 0 Active
US12199062B2 Device and method for the alignment of substrates Electricity 0 Active
US10825793B2 Method for permanently bonding wafers Electricity 0 Active
US11697281B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 0 Active
US11020953B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 0 Active
US11955339B2 Device and method for bonding of substrates Electricity 0 Active
US12131907B2 Device and method for bonding of substrates Electricity 0 Active
US11020951B2 Device and method for bonding substrates Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.