Patent · US Active

Substrate type sensor and method of measuring the impact point and the impact force of chemical

US12224189B2 · kind B2 · utility

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9Claims
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Key dates

Filing dateDec 29, 2021
Grant dateFeb 11, 2025
Priority date
Expiry dateJan 7, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/67259
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.