Method for sealing cavities using membranes

US12234144B2 · kind B2 · utility

Assignees

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR
• SOITEC · FR

Inventors

• Thierry SALVETAT · Grenoble, FR
• Bruno Ghyselen · La Tour sans Venin, FR
• Lamine Benaissa · Massy, FR
• Caroline COUTIER · Grenoble, FR
• Gweltaz Gaudin · Grenoble, FR

Key dates

• Filing date: Aug 18, 2020
• Grant date: Feb 25, 2025
• Expiry date: Jun 1, 2041

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0195
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for sealing cavities using membranes, the method including a) forming cavities arranged in a matrix, of a depth p, a characteristic dimension a, and spaced apart by a spacing b; and b) forming membranes, sealing the cavities, by transferring a sealing film. The method further includes a step a1), executed before step b), of forming a first contour on the front face and/or on the sealing face, the first contour comprising a first trench having a width L and a first depth p1, the formation of the first contour being executed such that after step b) the cavities are circumscribed by the first contour, said first contour being at a distance G from the cavities between one-fifth of b and five b.