Heater assembly including cooling apparatus and method of using same
US12247286B2 · kind B2 · utility
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2,211References
11Claims
0Family size
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Key dates
| Filing date | Aug 3, 2020 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | Nov 10, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A cooling apparatus and methods for maintaining a precursor source vessel heater at a desired temperature are disclosed. The apparatus and methods can be used to maintain a desired temperature gradient within the precursor source vessel for improved integrity of the precursor source before delivery of the precursor to a reaction chamber. The apparatus and methods can also be used for rapid cooling of a source vessel for maintenance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.