Using spectroscopic measurements for substrate temperature monitoring
US12249525B1 · kind B1 · utility
0Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2024 |
| Grant date | Mar 11, 2025 |
| Priority date | — |
| Expiry date | May 31, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Systems, methods, and computer-readable mediums for monitoring temperature of a substrate are described. Spectroscopic measurements are performed on a surface of the substrate using a metrology tool integrated with a processing tool. The measurements may be used to determine that the substrate has cooled below a threshold temperature using the spectroscopic measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.