Prashant Aji
10Patents
4h-index
38Co-inventors
60Inventor score
Filing activity: Jun 18, 2002 → May 31, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7283659B1 | Apparatus and methods for searching through and analyzing defect images and wafer maps | Physics | 23 | Expired |
| US6959251B2 | Inspection system setup techniques | Emerging Cross-Sectional Technologies | 7 | Expired |
| US9645097B2 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Physics | 6 | Active |
| US9747520B2 | Systems and methods for enhancing inspection sensitivity of an inspection tool | Physics | 4 | Active |
| US7072786B2 | Inspection system setup techniques | Emerging Cross-Sectional Technologies | 4 | Expired |
| US8765496B2 | Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis | Electricity | 3 | Active |
| US11709477B2 | Autonomous substrate processing system | Physics | 2 | Active |
| US8705027B2 | Optical defect amplification for improved sensitivity on patterned layers | Emerging Cross-Sectional Technologies | 2 | Active |
| US12265377B2 | Autonomous substrate processing system | Physics | 1 | Active |
| US12249525B1 | Using spectroscopic measurements for substrate temperature monitoring | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.