Multi-beam particle beam system and method for operating same

US12255040B2 · kind B2 · utility

Assignee

• Carl Zeiss MultiSEM GmbH · DE

Inventors

• Dirk Zeidler · Oberkochen, DE
• Christof Riedesel · Oberkochen, DE
• Arne Thoma · Heidenheim, DE
• Georgo Metalidis · Zang, DE
• Joerg Jacobi · Herbrechtingen, DE
• Stefan Schubert · Oberkochen, DE
• Ralf Lenke · Lauchheim, DE
• Ulrich Bihr · Bopfingen, DE
• Yanko Sarov · Aalen, DE
• Georg Kurij · Aalen, DE

Key dates

• Filing date: Mar 29, 2021
• Grant date: Mar 18, 2025
• Expiry date: Jan 18, 2044

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/24564
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A method of operating a multi-beam particle beam system includes: generating a multiplicity of particle beams such that they each pass through multipole elements that are either intact or defective; focusing the particle beams in a predetermined plane; determining excitations for the deflection elements of the multipole elements; exciting the deflection elements of the multipole elements that are intact with the determined excitations; modifying the determined excitations for the deflection elements of the multipole elements that are defective; and exciting the deflection elements of the defective multipole elements with the modified excitations. Modifying the determined excitations includes adding corrective excitations to the determined excitations. The corrective excitations are the same for all deflection elements of the defective multipole element.