Work piece holder and method of transferring a work piece
US12269135B2 · kind B2 · utility
0Cited by
13References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2023 |
| Grant date | Apr 8, 2025 |
| Priority date | — |
| Expiry date | Jun 13, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67736
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A work piece holder provided herein includes a support baffle and an elevating element. The support baffle extends along an arc path. The elevating element is disposed on the support baffle and is pivoted to be movable between an unlock status and a lock status.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.