Patent · US Active

Drive device, optical system and lithography apparatus

US12276916B2 · kind B2 · utility

0Cited by

2References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michel Aliman · Oberkochen, DE
Matthias Manger · Neukochen, DE
Lars Berger · Heubach, DE
Mohammad Awad · Abu Dhabi, AE

Key dates

Filing date	Oct 6, 2022
Grant date	Apr 15, 2025
Priority date	—
Expiry date	Feb 4, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG02B5/09
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A drive device includes: a drive unit configured to apply a drive voltage to a capacitive actuator to set a position of a capacitive actuator; a source controllable by an excitation signal and coupled to the first node to feed a time-dependent AC current signal into the first node so that an AC voltage arises at the capacitive actuator due to a superposition of the drive voltage and an AC voltage corresponding to a product of the AC current signal and an impedance of the capacitive actuator; a filter unit connected configured to filter an output signal of the capacitive actuator; and a determining unit configured to determine an impedance behaviour of the capacitive actuator depending on the filtered output signal, the determining unit configured to output the excitation signal to drive the source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.