Exhaust system with U-shaped pipes
US12276923B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 2024 |
| Grant date | Apr 15, 2025 |
| Priority date | — |
| Expiry date | May 24, 2044 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/10
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An exhaust system for discharging from semiconductor manufacturing equipment a hazardous gas includes: a main exhaust pipe above the semiconductor manufacturing equipment and having a top surface on a first side and a bottom surface on a second side, a first branch pipe connected to a source of a gas mixture containing the hazardous gas on the second side and connected to the main exhaust pipe through the top surface, a second branch pipe connected to a gas box on the second side and connected to the main exhaust pipe through the bottom surface, and a detector on the second branch pipe configured to detect presence of the hazardous gas and downstream to the gas box. The first and the second branch pipes are connected to the main exhaust pipe at a first location and a second location, respectively. The first location is more upstream than the second location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.