Alignment fixture for a reactor system
US12278129B2 · kind B2 · utility
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2,214References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2021 |
| Grant date | Apr 15, 2025 |
| Priority date | — |
| Expiry date | Aug 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67069
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An alignment fixture for a reactor system may comprise a fixture body comprising an inner perimeter at least partially defining a shape which comprises an inner space of the fixture body, wherein the inner space is configured to receive a susceptor of a reactor system; and/or a measuring protrusion coupled to the fixture body at a first position and protruding from the fixture body toward the inner space. The measuring protrusion may comprise an indicator between the fixture body and a measuring protrusion end of the measuring protrusion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.