Inventor · Cave Creek, AZ, US

Todd Robert Dunn

31Patents
10h-index
31Co-inventors
71Inventor score

Filing activity: Aug 27, 2010 → Sep 6, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9017481B1 Process feed management for semiconductor substrate processing Electricity 716 Active
US9005539B2 Chamber sealing member Electricity 529 Active
US9096931B2 Deposition valve assembly and method of heating the same Emerging Cross-Sectional Technologies 515 Active
US9202727B2 Susceptor heater shim Electricity 506 Active
US8933375B2 Susceptor heater and method of heating a substrate Electricity 499 Active
US9299595B2 Susceptor heater and method of heating a substrate Electricity 488 Active
US9574268B1 Pulsed valve manifold for atomic layer deposition Electricity 471 Active
US9892908B2 Process feed management for semiconductor substrate processing Electricity 456 Active
US10276355B2 Multi-zone reactor, system including the reactor, and method of using the same Electricity 396 Active
US9340874B2 Chamber sealing member Electricity 17 Active
US10370761B2 Pulsed valve manifold for atomic layer deposition Electricity 7 Active
US10683571B2 Gas supply manifold and method of supplying gases to chamber using same Electricity 6 Active
US10714315B2 Semiconductor reaction chamber showerhead Chemistry; Metallurgy 4 Active
US11501956B2 Semiconductor reaction chamber showerhead Chemistry; Metallurgy 3 Active
US11404302B2 Substrate susceptor using edge purging Electricity 2 Active
US10832903B2 Process feed management for semiconductor substrate processing Electricity 2 Active
US8251818B1 Reflex training and improvement system Human Necessities 2 Active
US11626308B2 Laser alignment fixture for a reactor system Emerging Cross-Sectional Technologies 2 Active
US11629406B2 Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate Electricity 1 Active
US11972969B2 Laser alignment fixture for a reactor system Emerging Cross-Sectional Technologies 0 Active
US11781221B2 Chemical source vessel with dip tube Physics 0 Active
US12406871B2 Substrate susceptor using edge purging Electricity 0 Active
US12297540B2 Chemical source vessel with dip tube Physics 0 Active
US10266946B2 Pulsed valve manifold for atomic layer deposition General 0 Revoked
US12234552B2 Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.