Live-assisted image acquisition method and system with charged particle microscopy
US12288667B2 · kind B2 · utility
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Key dates
| Filing date | Jun 2, 2022 |
| Grant date | Apr 29, 2025 |
| Priority date | — |
| Expiry date | Mar 27, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/226
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of imaging a sample includes acquiring one or more first images of a region of the sample at a first imaging condition with a charged particle microscope system. The one or more first images are applied to an input of a trained machine learning model to obtain a predicted image indicating atom structure probability in the region of the sample. An enhanced image indicating atom locations in the region of the sample based on the atom structure probability in the predicted image is caused to be displayed in response to obtaining the predicted image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.