Patent · US Active

Particle beam system

US12293896B2 · kind B2 · utility

0Cited by

92References

33Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Dirk Zeidler · Oberkochen, DE
Hans Fritz · Grabs, CH
Ingo Mueller · Heidelberg, DE
Stefan Schubert · Oberkochen, DE
Arne Thoma · Heidenheim, DE
Andras G. Major · Oberkochen, DE

Key dates

Filing date	Dec 17, 2020
Grant date	May 6, 2025
Priority date	—
Expiry date	Mar 6, 2044

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2817
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.