Illumination field non-uniformity detection system, detection method, correction method, and device
US12315117B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2022 |
| Grant date | May 27, 2025 |
| Priority date | — |
| Expiry date | Dec 16, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/20212
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are illumination field non-uniformity detection system, detection method, correction method, and device provided. The system includes displacement control module, controlling displacement platform to drive photodetector and image sensor to move within illumination field; illumination signal acquisition module, controlling the photodetector to collect different response signals at various collecting frequencies within the illumination field and controlling the image sensor to collect response images within the illumination field; data processing module, obtaining, based on different response signals, multiple illumination fields with different light radiation intensities and light intensity distribution considered to be uniform; based on this, obtaining multiple corrected image sensor grayscale matrices; fitting the multiple corrected image sensor grayscale matrices to obtain parameter matrix; and non-uniformity detection module, correcting the response images based on the parameter matrix; and characterizing non-uniformity of light intensity distribution within the illumination field using non-uniform metrics of grayscale distribution of the corrected response images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.