Dual zone heaters for metallic pedestals
US12322617B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2024 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Feb 16, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B1/0233
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A temperature-controlled substrate support for a substrate processing system includes a substrate support and a controller. The substrate support includes N zones and N resistive heaters, respectively, where N is an integer greater than one, and a temperature sensor located in one of the N zones. The controller is configured to calculate N resistances of the N resistive heaters during operation and adjust power to N−1 of the N resistive heaters during operation of the substrate processing system in response to a temperature measured by the temperature sensor located in the one of the N zones and the N resistances of the N resistive heaters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.