Inventor · Portland, OR, US

Aaron Durbin

12Patents
3h-index
10Co-inventors
53Inventor score

Filing activity: Aug 25, 2009 → Feb 16, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US8405414B2 Wafer testing systems and associated methods of use and manufacture Physics 9 Active
US10633742B2 Use of voltage and current measurements to control dual zone ceramic pedestals Electricity 4 Active
US11028482B2 Use of voltage and current measurements to control dual zone ceramic pedestals Electricity 3 Active
US8872533B2 Wafer testing system and associated methods of use and manufacture Physics 3 Active
USD948658S1 High density hole pattern dual plenum hole showerhead assembly General 3 Active
US11908715B2 Dynamic temperature control of substrate support in substrate processing system Electricity 1 Active
US8362797B2 Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed therebetween Physics 1 Active
US9176186B2 Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed Physics 0 Active
US9612259B2 Wafer testing system and associated methods of use and manufacture Physics 0 Active
US12322617B2 Dual zone heaters for metallic pedestals Electricity 0 Active
US9146269B2 Maintaining a wafer/wafer translator pair in an attached state free of a gasket diposed Physics 0 Active
US10571489B2 Wafer testing system and associated methods of use and manufacture Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.