Electrostatic chuck prepared by additive manufacturing, and related methods and structures
US12322634B2 · kind B2 · utility
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5References
19Claims
0Family size
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Key dates
| Filing date | Dec 21, 2021 |
| Grant date | Jun 3, 2025 |
| Priority date | — |
| Expiry date | Oct 26, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.