Systems and methods for controlling precursor delivery

US12334364B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Michael Watson · Leander, US
• Christopher J. Calhoun · San Diego, US
• Cristian Ocampo · Paris, FR
• Scott L. Battle · Cedar Park, US
• Benjamin Cardozo · Burnet, US
• Benjamin R. Garrett · Leander, US

Key dates

• Filing date: Mar 20, 2023
• Grant date: Jun 17, 2025
• Expiry date: May 3, 2043

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/52
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Systems and methods for controlling precursor delivery. The systems and methods may comprise a precursor delivery vessel in fluid communication with a gas flow line. The precursor delivery vessel may comprise at least one tray containing a vaporizable precursor. An amount of thermal energy may be supplied to the at least one tray in an amount sufficient to vaporize the vaporizable precursor. The vaporized precursor may be dispensed from the precursor delivery vessel to the gas flow line. The amount of thermal energy supplied to the at least one tray may be adjusted sufficient to maintain a pressure of the vaporized precursor, in the gas flow line, within a pressure range.