Scott L. Battle
26Patents
10h-index
40Co-inventors
75Inventor score
Filing activity: Mar 31, 2000 → Mar 20, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8444120B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 529 | Active |
| US8821640B2 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | Chemistry; Metallurgy | 514 | Active |
| US6921062B2 | Vaporizer delivery ampoule | Emerging Cross-Sectional Technologies | 124 | Expired |
| US7300038B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 45 | Expired |
| US7487956B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 19 | Active |
| US7556244B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 19 | Active |
| US7828274B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 16 | Active |
| US8128073B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 14 | Active |
| US7108771B2 | Method for removal of impurities in cyclic siloxanes useful as precursors for low dielectric constant thin films | Performing Operations; Transporting | 11 | Expired |
| US6458984B1 | Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS) | Chemistry; Metallurgy | 10 | Expired |
| US10392700B2 | Solid vaporizer | Chemistry; Metallurgy | 10 | Active |
| US9004462B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 8 | Active |
| US9469898B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 8 | Active |
| US10385452B2 | Source reagent-based delivery of fluid with high material flux for batch deposition | Chemistry; Metallurgy | 7 | Active |
| US10465286B2 | Method and apparatus to help promote contact of gas with vaporized material | Emerging Cross-Sectional Technologies | 6 | Active |
| US10895010B2 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | Chemistry; Metallurgy | 4 | Active |
| US10526697B2 | High-purity tungsten hexacarbonyl for solid source delivery | Chemistry; Metallurgy | 3 | Active |
| US9997362B2 | Cobalt CVD | Electricity | 3 | Active |
| US9637395B2 | Fluorine free tungsten ALD/CVD process | Electricity | 1 | Active |
| US10895347B2 | Heat transfer to ampoule trays | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US8053375B1 | Super-dry reagent compositions for formation of ultra low k films | Electricity | 0 | Active |
| US11746413B2 | Chemical delivery system and method of operating the chemical delivery system | Chemistry; Metallurgy | 0 | Active |
| US12334364B2 | Systems and methods for controlling precursor delivery | Chemistry; Metallurgy | 0 | Active |
| US11421320B2 | Chemical delivery system and method of operating the chemical delivery system | Chemistry; Metallurgy | 0 | Active |
| US11821087B2 | Vaporization vessel and method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.