Method and system for depositing molybdenum layers
US12351903B2 · kind B2 · utility
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11References
11Claims
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Key dates
| Filing date | May 2, 2023 |
| Grant date | Jul 8, 2025 |
| Priority date | — |
| Expiry date | Aug 4, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C28/341
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods and systems for forming molybdenum layers on a surface of a substrate and structures and devices formed using the methods are disclosed. Exemplary methods include forming an underlayer prior to forming the molybdenum layer. The underlayer can be used to manipulate stress in the molybdenum layer and/or reduce a nucleation temperature and/or deposition temperature of a step of forming the molybdenum layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.