Large spot spectral sensing to control spatial setpoints
US12360510B2 · kind B2 · utility
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13References
30Claims
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Key dates
| Filing date | Apr 15, 2022 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Jan 31, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/45031
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A large beam spot spectral reflectometer system for measuring a substrate is provided. Hardware components for collecting in situ large beam spot optical signals is disclosed. Machine learning models for denoising large beam spot optical signals are disclosed. Machine learning models for interpreting in situ optical data and facilitating process control are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.