Method for inspecting a specimen and charged particle beam device

US12362131B2 · kind B2 · utility

Assignees

• Applied Materials Israel Ltd. · IL
• TECHNISCHE UNIVERSITEIT DELFT · NL

Inventors

• Pieter Kruit · Delft, NL
• Ron Naftali · Shoham, IL
• Jürgen Frosien · Riemerling, DE
• Ralf Schmid · Karlsruhe, DE
• Benjamin John Cook · Munich, DE
• Roman Barday · Poing, DE
• Dieter Winkler · Munich, DE

Key dates

• Filing date: Oct 21, 2019
• Grant date: Jul 15, 2025
• Expiry date: Mar 22, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2817
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A charged particle beam device for irradiating or inspecting a specimen is described. The charged particle beam device includes a charged particle beam source for generating a primary charged particle beam and a multi-aperture lens plate having a plurality of apertures for forming four or more primary. Two or more electrodes having one opening, e.g. having one opening each, for the primary charged particle beam or the four or more primary beamlets are provided. The charged particle beam device further includes a collimator for deflecting a first primary beamlet, a second primary beamlet, a third primary beamlet, and a fourth primary beamlet of the four or more primary beamlets with respect to each other. The charged particle beam device further includes an objective lens unit having three or more electrodes, each electrode having openings for the four or more primary beamlets.