Inventor · Shoham, IL

Ron Naftali

45Patents
10h-index
61Co-inventors
78Inventor score

Filing activity: Dec 24, 1998 → Oct 6, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7468506B2 Spot grid array scanning system Physics 53 Expired
US6124924A Focus error correction method and apparatus Physics 50 Expired
US7468507B2 Optical spot grid array scanning system Physics 29 Expired
US6657714B2 Defect detection with enhanced dynamic range Physics 22 Expired
US7630069B2 Illumination system for optical inspection Electricity 18 Active
US6366352B1 Optical inspection method and apparatus utilizing a variable angle design Physics 18 Expired
US6882417B2 Method and system for detecting defects Electricity 13 Expired
US6809808B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 13 Expired
US6861660B2 Process and assembly for non-destructive surface inspection Physics 10 Expired
US7030978B2 System and method for inspection of a substrate that has a refractive index Physics 10 Expired
US7053395B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 8 Expired
US7109463B2 Amplifier circuit with a switching device to provide a wide dynamic output range Electricity 8 Expired
US6853475B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 6 Expired
US7053999B2 Method and system for detecting defects Physics 6 Expired
US6898304B2 Hardware configuration for parallel data processing without cross communication Physics 5 Expired
US6914670B1 Defect detection with enhanced dynamic range Physics 5 Expired
US6469784B2 Optical inspection method and apparatus utilizing a variable angle design Physics 5 Expired
US7173694B2 Method and system for detecting defects Physics 5 Expired
US7184612B2 Hardware configuration for parallel data processing without cross communication Physics 4 Expired
US7428850B2 Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system Electricity 4 Active
US7924419B2 Illumination system for optical inspection Electricity 3 Active
US7460221B2 Method and system for detecting defects Physics 3 Active
US10504687B2 Signal separator for a multi-beam charged particle inspection apparatus Electricity 3 Active
US10811219B2 Method for evaluating a region of an object Electricity 3 Active
US7973919B2 High resolution wafer inspection system Physics 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.