Heat treatment device
US12363801B2 · kind B2 · utility
0Cited by
0References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2022 |
| Grant date | Jul 15, 2025 |
| Priority date | — |
| Expiry date | Apr 8, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/22
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to an embodiment of the present disclosure, a heat treatment device includes: a chamber capable of maintaining an atmosphere that is decompressed from an atmospheric pressure; an exhaust unit capable of exhausting an inside of the chamber through an exhaust port provided in the chamber; a support portion provided inside the chamber and capable of supporting a workpiece; a first heating unit provided inside the chamber and capable of heating the workpiece; an adhesion preventive plate detachably provided on an inner wall of the chamber; and a second heating unit capable of heating the adhesion preventive plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.