Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufacturing method therefor
US12398459B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Mar 6, 2020 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | Mar 30, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/401
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a silicon oxide encapsulation film comprising a metal or a metal oxide, and a manufacturing method therefor. The silicon metal oxide encapsulation film according to the present invention has a high thin film growth rate and low moisture and oxygen permeabilities, thereby exhibiting a very excellent sealing effect even at a low thickness, and the stress strength and refractive index thereof can be controlled, thereby enabling a high-quality silicon metal oxide encapsulation film that is applicable to a flexible display to be readily manufactured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.