Susceptor
US12406864B2 · kind B2 · utility
0Cited by
6References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2024 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Oct 29, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/283
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to a susceptor, and a susceptor of the present disclosure may improve temperature uniformity over the entire area of the upper surface of the susceptor by arranging a heater pattern of a multilayer structure so that arcs thereof do not overlap or so that the straight sections of the heater are arranged at different angles with respect to the center in different layers, or by arranging the straight sections of the heater at different angles with respect to the center even in a heater pattern of a single-layer structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.