Substrate carrier with array of independently controllable heater elements
US12406865B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2021 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Jul 3, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/035
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate carrier is described with an array of independently controllable heater elements. In one example an apparatus includes a substrate carrier to carry a substrate for processing, a plurality of resistive heating elements in the carrier to heat the substrate by heating the carrier, a power supply to supply power to the heating elements, a power controller to provide a control signal, the control signal to control an amount of current applied to each of the heating elements, and a plurality of power interfaces in the carrier each coupled to a heating element to receive the power from the power supply and the control signal from the controller and to modulate the power applied to a respective coupled heating element in response to the control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.