Microelectronic devices including stadium structures
US12406926B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2021 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Feb 8, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B41/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.