Bidirectional indexing apparatus
US12410521B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2020 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Nov 24, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In an example embodiment, a bidirectional indexing apparatus includes a plurality of bidirectional indexing heads that can operate independently of each other or in concert to adjust a gap between a substrate and a pedestal in a substrate processing chamber. In some embodiments, a bidirectional indexing head comprises a base; a rotatable plate rotatable relative to the base, the rotatable plate including a plurality of profiled pockets each defining a camming surface therein; and a plurality of camming pins, each disposed to act on the camming surface of a respective profiled pocket to move the rotatable plate in a first or second rotatable direction when actuated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.