Matthew Mudrow
7Patents
2h-index
15Co-inventors
40Inventor score
Filing activity: Dec 23, 2016 → Jan 30, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10147597B1 | Turbulent flow spiral multi-zone precursor vaporizer | Chemistry; Metallurgy | 10 | Active |
| US10354857B2 | High power low pressure UV bulb with plasma resistant coating | Human Necessities | 6 | Active |
| US11946142B2 | Spatially tunable deposition to compensate within wafer differential bow | Electricity | 1 | Active |
| US12215804B2 | Cooling of air actuated valve using actuating air | Electricity | 0 | Active |
| US12410521B2 | Bidirectional indexing apparatus | Electricity | 0 | Active |
| US12338531B2 | Spatially tunable deposition to compensate within wafer differential bow | Electricity | 0 | Active |
| US10161034B2 | Rapid chamber clean using concurrent in-situ and remote plasma sources | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.