Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object
US12411424B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
Assignee
Inventors
- Remco VAN DE MEERENDONK
- Daniel Jozef Maria Direcks
- Günes NAKIBOGLU
- Nicholas Peter Waterson
- Joost André KLUGKIST
- Sven Pekelder
- Antonius Johannus Van Der Net
- Johannes Henricus Wilhelmus Jacobs
- Jaap Oudes
- Gerardus Arnoldus Hendricus Franciscus Janssen
- Jeroen Peterus Johannes VAN LIPZIG
- Johannes Franciscus Martinus Van Santvoort
Key dates
| Filing date | Mar 22, 2022 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Sep 22, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A temperature conditioning system using conditioning liquid to condition a temperature of an object, the system including a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber, wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.