Confocal chromatic metrology for EUV source condition monitoring
US12418972B2 · kind B2 · utility
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3References
22Claims
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Key dates
| Filing date | Sep 14, 2022 |
| Grant date | Sep 16, 2025 |
| Priority date | — |
| Expiry date | Jan 12, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2240/20
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A light source includes a rotatable drum to be coated with xenon ice and illuminated by a laser beam to produce a plasma. The drum may also be translatable. The light source further includes a confocal chromatic sensor to measure distances from the confocal chromatic sensor to the rotatable drum. The confocal chromatic sensor may include a sensor head to focus light onto the rotatable drum and to detect reflected light from the rotatable drum. The sensor head and the rotatable drum may be disposed within a vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.