Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment
US12429846B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2024 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Jun 28, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06N20/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system includes a processing device, operatively coupled to the memory device, to perform operations comprising obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate. A machine-learning model is applied to the plurality of sensor values. The machine-learning model is trained based on historical sensor data of a sub-system of the process chamber and task data associated with the recipe for depositing the film. An output of the machine-learning model is generated that is indicative of a suspected failure of the sub-system and a corrective action is generated based on the suspected failure of the sub-system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.