Method of assembling drift tube assemblies in ion implantors
US12431329B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2023 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Jun 18, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2277/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator comprising at least one acceleration stage including a resonator coil coupled to a drift tube assembly, the drift tube assembly including a first drift tube coupled to a first end of a first insulting rod via interference fit, a second drift tube coupled to a first end of a second insulting rod via interference fit, and a mounting bracket coupled to a second end of the first insulting rod and to a second end of the second insulting rod via interference fit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.