Automated two-sided cleaning apparatus
US4109337A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1977 |
| Grant date | Aug 29, 1978 |
| Priority date | — |
| Expiry date | Dec 8, 1997 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B1/34
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Apparatus is disclosed for automatically and simultaneously cleaning both sides of a plurality of workpieces. The workpieces are illustratively thin, fragile slices of brittle material, such as single-crystal silicon wafers. These workpieces are supplied to the cleaning apparatus within a cassette. The cleaning apparatus includes a cassette receiving station, a processing station and guide means extending from the cassette receiving station through the processing station. The guide means is adapted to receive edge portions of the workpieces. A transfer arm is extended from a retracted position through the cassette so that a first portion of the transfer arm pushes a workpiece along the guide means through the processing station. The transfer arm is then retracted and a second portion of the transfer arm pushes the workpiece along the guide means back through the processing station and into the cassette. The cassette is then moved so that the next workpiece to be processed is in position adjacent the guide means. The processing station extends on both sides of the guide means and includes a scrubbing station. In the region of the scrubbing station, the guide means is arranged so tha…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.