Patent · US Expired

Objective lens for electron microscope

US4383176A · kind A · utility

3Cited by
1References
1Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 29, 1981
Grant dateMay 10, 1983
Priority date
Expiry dateJan 29, 2001

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J37/141
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A symmetrical magnetic field type objective lens for an electron microscope comprises an upper magnetic pole piece and a lower magnetic pole piece disposed below the upper pole piece with a predetermined inter-pole distance S. Bores of a same diameter b are formed in the upper and the lower pole pieces, respectively. The distance S and the diameter are selected so that 1.ltoreq.S/b.ltoreq.5. Additionally, excitation J of the objective lens is so selected with respect to a predetermined magnetomotive force Jc.o. of a Riecke-Ruska's condenser objective lens that the condition that 1.4 Jc.o..ltoreq.J.ltoreq.1.7 Jc.o. is fulfilled. The objective lens assures a wide field of view without being accompanied with blurs or distortion of image.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.