Device for measuring thin films by means of beta radiation

US4406948A · kind A · utility

Inventors

• Helmut Fischer · Calw, DE
• Willi Steegmuller · Nagold, DE
• Werner Volz · Sindelfingen, DE

Key dates

• Filing date: Oct 14, 1980
• Grant date: Sep 27, 1983
• Expiry date: Oct 14, 2000

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B15/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A tube arrangement has a first partial tube and a second partial tube, and one fine adjustment arrangement for coaxially displacing the partial tubes with respect to one another. The partial tubes, an aperture ring with a small aperture opening, a beta radiator point source and a GM-counter are coaxially arranged. The partial tubes are connected each with one or two of the following: an aperture ring, the beta radiator point source, and the GM-counter. A blocking means blocks the fine adjustment arrangement. One of the partial tubes is connected galvanically conducting with the GM-counter anode and the other partial tubes are connected galvanically conducting with the GM-counter cathode.