Processing apparatus and method
US4592926A · kind A · utility
7Cited by
9References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 1984 |
| Grant date | Jun 3, 1986 |
| Priority date | — |
| Expiry date | May 21, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vacuum processing apparatus and method utilize a vacuum chamber formed from a pair of casing sections, one of which is movable in to and out of sealing engagement with the other casing section. The movable casing section is equipped to carry a workpiece such that the workpiece is carried by the movable casing section as it moves into and out of sealing engagement with the other casing section and such that the workpiece is delivered to a processing station associated with the other casing section when the two casing sections are in sealing engagement with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.