Yasunari Motoki
5Patents
4h-index
5Co-inventors
46Inventor score
Filing activity: Aug 14, 1984 → Nov 15, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4987284A | Downstream microwave plasma processing apparatus having an improved coupling structure between microwave plasma | Electricity | 32 | Expired |
| US4938839A | Method of removing photoresist on a semiconductor wafer | Physics | 28 | Expired |
| US5364519A | Microwave plasma processing process and apparatus | Electricity | 22 | Expired |
| US4637146A | Spin dryer | Physics | 16 | Expired |
| USRE36224E | Microwave plasma processing process and apparatus | General | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.