Process apparatus and method and elevator mechanism for use in connection therewith
US4685852A · kind A · utility
13Cited by
17References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 1985 |
| Grant date | Aug 11, 1987 |
| Priority date | — |
| Expiry date | May 20, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods and apparatus for transferring workpieces, such as silicon wafers, between a pair of cassettes involve simultaneously and conjointly indexing the cassettes such that the cassettes are incrementally lowered as the individual workpieces are removed from one cassette and delivered to the other cassette. Such indexing of the cassettes is achieved by a single elevator mechanism adapted to support both of the cassettes such that they are vertically and horizontally offset relative to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.